Since its founding in 1968, ASM pioneered important aspects of many established wafer-processing technologies used in the semiconductor manufacturing industry, including lithography, deposition, ion implant and single-wafer epitaxy. ASM’s current products include Chemical Vapor Deposition, Atomic Layer Deposition, Epitaxy, Diff usion and Oxidation. In recent years, we brought Atomic Layer Deposition (ALD) and Plasma Enhanced Atomic Layer Deposition (PEALD) from R&D right through to mainstream production.
Our technology helps our customers to progress along their technology roadmap, thus making integrated circuit chips smaller, faster and more powerful. ASM is part of the ASM International NV group that also includes ASM Pacifi c Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership of approximately 40%, is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.